Share Email Print
cover

Proceedings Paper

Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition
Author(s): Mark B. Moran; Linda F. Johnson
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The preceding paper in these proceedings provided a detailed discussion of colloidal and crystalline-phase chlorine-doped carbon nitride (CNx:Cl) films synthesized by electron cyclotron resonance (ECR) chemical vapor deposition (CVD). This paper focuses on diamond-like carbon (DLC) and hydrogenated carbon-nitride (CNx:H) films deposited by ECR-CVD in either a nitrogen- or an argon-high-density plasma using one of the following hydrocarbon precursors; trichloroethylene, tetrachloroethylene, neopentane or ethylene. For clarity, results and discussions for the CNx:Cl deposits are presented again. Electron spectroscopy for chemical analysis (ESCA) and Fourier transform infrared (FTIR) spectroscopy show that the ECR-CVD experiments so far have resulted in four distinctly different chemical compositions; CNx:Cl, CNx:H, hydrogenated amorphous carbon (a-C:H) and chlorine-doped amorphous carbon (a-C:Cl). The a-C:H films deposited from neopentane and nitrogen have the lowest refractive index and the highest bandgap. The a-C:Cl films exhibit a strong infrared peak at about 1560 cm-1 indicating that they may contain a large amount of microcrystalline graphite.

Paper Details

Date Published: 27 June 1997
PDF: 13 pages
Proc. SPIE 3060, Window and Dome Technologies and Materials V, (27 June 1997); doi: 10.1117/12.277064
Show Author Affiliations
Mark B. Moran, Naval Air Warfare Ctr. (United States)
Linda F. Johnson, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 3060:
Window and Dome Technologies and Materials V
Randal W. Tustison, Editor(s)

© SPIE. Terms of Use
Back to Top