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Proceedings Paper

Measurement and calibration of dynamic performance of piezoelectric micromotor
Author(s): Zhoumo Zeng; Ming Yang; Xueyou Yang; Jiazi Sun
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Paper Abstract

Piezoelectric micromotor, as one kind of the mainly actuator in Micro Electro Mechanical Systems, has been paid a great deal of attention to. This paper offers an idea of measuring the dynamic performance of a piezoelectric micromotor by means of Laser Doppler Avemometry. Based on the idea, the transient response and influence of some factors of an around travelling wave ultra motor are inspected.

Paper Details

Date Published: 19 June 1997
PDF: 6 pages
Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276621
Show Author Affiliations
Zhoumo Zeng, Tianjin Univ. (China)
Ming Yang, Tianjin Univ. (China)
Xueyou Yang, Tianjin Univ. (China)
Jiazi Sun, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 3046:
Smart Structures and Materials 1997: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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