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Proceedings Paper

Application of PZT thin films in microelectromechanical systems
Author(s): Dennis L. Polla
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Paper Abstract

Piezoelectric thin films have been integrated with silicon microfabrication methods in the formation of both sensors and actuators (commonly called MEMS). This work describes several applications of merged PZT thin film technology, solid-state micromachining, and silicon-based integrated circuit fabrication methods in the formation of acoustic emission microsensors, cantilever microbeam accelerometers, diaphragm micropumps, and cantilever microvalves. When combined with CMOS-based integrated circuits, these sensors and actuators form smart microelectromechanical systems with potentially low-cost and high performance.

Paper Details

Date Published: 19 June 1997
PDF: 4 pages
Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); doi: 10.1117/12.276603
Show Author Affiliations
Dennis L. Polla, Univ. of Minnesota/Twin Cities (United States)


Published in SPIE Proceedings Vol. 3046:
Smart Structures and Materials 1997: Smart Electronics and MEMS
Vijay K. Varadan; Paul J. McWhorter, Editor(s)

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