Share Email Print

Proceedings Paper

Improved signal processing method for heterodyne interferometer
Author(s): Hongzhi Zhao; Yang Zhao
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.

Paper Details

Date Published: 17 July 1996
PDF: 4 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276329
Show Author Affiliations
Hongzhi Zhao, Tsinghua Univ. (United States)
Yang Zhao, Tsinghua Univ. (United States)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

© SPIE. Terms of Use
Back to Top