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Proceedings Paper

Improved signal processing method for heterodyne interferometer
Author(s): Hongzhi Zhao; Yang Zhao
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Paper Abstract

On the basis of the combination of phase measurement and integer periodic phase measurement, a signal processing scheme, which is used for optical heterodyne interferometer with large range, is described. It not only maintains the high measuring resolution , but also enlarges the measuring range, with solving the problem of large range and measurement of dynamic displacement.

Paper Details

Date Published: 17 July 1996
PDF: 4 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276329
Show Author Affiliations
Hongzhi Zhao, Tsinghua Univ. (United States)
Yang Zhao, Tsinghua Univ. (United States)


Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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