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Proceedings Paper

Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST)
Author(s): Weiming Cheng; Mingyi Chen
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Paper Abstract

Multiaperture overlap-scanning technique (MAOST) has been successfully used to measure larger optical flat with a smaller reference flat. This paper extends the technique to measure an optical cylinder. Utilizing the information in overlap area between subapertures, MAOST connects them to one aperture called full aperture. With the technique, half a cylinder or even a whole cylinder can be accurately measured. In the paper, the fundamental is discussed, mathematical model is given and connection results of 2 interferograrns and 17 interferograms are shown. Results indicate that the error in principle of the method is about the order of 108 A

Paper Details

Date Published: 17 July 1996
PDF: 8 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276321
Show Author Affiliations
Weiming Cheng, Shanghai Univ. (China)
Mingyi Chen, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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