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Proceedings Paper

Optical flat surfaces: subtraction of small-scale irregularities of the reference surface
Author(s): Parameswaran Hariharan; Mark A. Suchting
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Paper Abstract

A simple method which can be used to map the small-scale irregularities of the reference surface in an interferometer is described. This reference data set can be stored and subtracted from interferograms recorded subsequently with any test surface to evaluate the small-scale irregularities of the test surface.

Paper Details

Date Published: 17 July 1996
PDF: 7 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276319
Show Author Affiliations
Parameswaran Hariharan, CSIRO (Australia)
Mark A. Suchting, CSIRO (Australia)


Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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