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Proceedings Paper

Self-calibrating five-frame algorithm for phase-shifting interferometry
Author(s): S. Tang
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Paper Abstract

One of the main error sources for phase shifting interferometry is the linear phase shift error. This paper presents a self-calibrating phase-measuring algorithm that is free from errors produced by this error source. In the other words, the proposed algorithm is able to obtain an accurate phase at every pixel point in the interferograms over a wide range of equally spaced phase shifts. The algorithm requires the acquisition of five phase shifted interferograms. It resembles the well-known Carre' s algorithm, but with one extra frame. This algorithm, however, has considerable advantages over Cane' s algorithm.

Paper Details

Date Published: 17 July 1996
PDF: 8 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276293
Show Author Affiliations
S. Tang, Phase Shift Technology, Inc. (United States)

Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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