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Proceedings Paper

General hierarchical approach in absolute phase measurement
Author(s): Wolfgang Osten; Werner Nadeborn; Peter Andrae
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Paper Abstract

Starting from a description of the absolute phase problem in fringe processing and a discussion of existing solutions a general approach for robust absolute phase measurement in optical metrology is presented. Using this method the continous phase field can be reconstructed with high accuracy by a stepwise or so called hierarchical approach without any interaction necessary in conventional phase unwrapping if technical objects have to be investigated. The determination of the sequence of synthetic wavelengths is strongly oriented on the phase measuring accuracy and the known limits of the absolute phase. Keywords: optical metrology, shape measurement, displacement measurement, fringe processing, absolute phase measurement

Paper Details

Date Published: 17 July 1996
PDF: 12 pages
Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); doi: 10.1117/12.276292
Show Author Affiliations
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner Nadeborn, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Peter Andrae, Bremer Institut fuer Angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 2860:
Laser Interferometry VIII: Techniques and Analysis
Malgorzata Kujawinska; Ryszard J. Pryputniewicz; Mitsuo Takeda, Editor(s)

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