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Proceedings Paper

Nanosize microstructure formation by anodizing the thin film structures
Author(s): V. M. Parkoun; N. P. Petrov; L. M. Lynkov
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Paper Abstract

Application of controlled local dissolution of multilayer thin film systems during electrochemical anodizing for forming of ordered nanosized structures is proposed. For producing approximately equals 0.1 micrometers microbulger systems the refractory metal (RM) - Al bilayer structures structures were used. Microbulgers of RM were obtained by anodizing bilayer structures. Microbulgers are shaped as Al2O3 pores, have 0.3 micrometers height and 4000 microbulgers/micrometers 2 density. The degree of their ordering is estimated and determined using mathematical morphology operation erosion and dilation.

Paper Details

Date Published: 13 June 1997
PDF: 3 pages
Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); doi: 10.1117/12.276249
Show Author Affiliations
V. M. Parkoun, Belarusian State Univ. of Informatics and Radioelectronics (Belarus)
N. P. Petrov, Belarusian State Univ. of Informatics and Radioelectronics (Belarus)
L. M. Lynkov, Belarusian State Univ. of Informatics and Radioelectronics (Belarus)


Published in SPIE Proceedings Vol. 3179:
Solid State Crystals in Optoelectronics and Semiconductor Technology
Antoni Rogalski; Jaroslaw Rutkowski; Andrzej Majchrowski; Jerzy Zielinski, Editor(s)

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