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Proceedings Paper

Lithium niobate as the substratum for the SAW acceleration sensor
Author(s): Jerzy Filipiak; Lech Solarz; Jerzy Ostrowski; Cezary Kopycki
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Paper Abstract

Some aspects of the design of SAW acceleration sensors are investigated. The principles of operation are briefly reassumed. Our studies reveal that the cantilever beam is the optimum mechanical structure for the device. The calculations and experiments allow to determine the limits of applicability of lithium niobate as the substratum for the SAW acceleration sensor.

Paper Details

Date Published: 13 June 1997
PDF: 4 pages
Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); doi: 10.1117/12.276234
Show Author Affiliations
Jerzy Filipiak, Military Univ. of Technology (Poland)
Lech Solarz, Military Univ. of Technology (Poland)
Jerzy Ostrowski, Military Univ. of Technology (Poland)
Cezary Kopycki, Military Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 3179:
Solid State Crystals in Optoelectronics and Semiconductor Technology
Antoni Rogalski; Jaroslaw Rutkowski; Andrzej Majchrowski; Jerzy Zielinski, Editor(s)

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