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Proceedings Paper

PtSi Schottky-barrier infrared FPAs with CDS readout
Author(s): Masafumi Kimata; Tatsuo Ozeki; Masahiro Nunoshita; Sho Ito
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Paper Abstract

High performance PtSi Schottky-barrier focal plane arrays (SB FPAs) have been developed for thermal imaging by using a process technology fully compatible with silicon VLSI and an original readout architecture called Charge Sweep Device (CSD). Eliminating limitations of the conventional interline transfer CCD readout architecture, the CSD readout architecture makes it possible to design small pixels with high fill factors and large saturation levels. Thanks to a high fill factor of 71 percent and a large saturation level of 2.9 X 106 electrons, a 512 X 512 element SB CSD FPA with a 26 X 20 micrometers 2 pixel size has achieved a very low noise equivalent temperature difference of 0.033 K at 300 K with f/1.2 optics and a 30 Hz frame rate. A high- resolution SB CSD FPA with 1040 X 1040 pixels has also been developed. This high-resolution FPA produces HDTV- quality IR images at the standard TV frame rate. IR cameras with these FPAs have been used and proved to be useful for a wide variety of applications.

Paper Details

Date Published: 13 June 1997
PDF: 12 pages
Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); doi: 10.1117/12.276227
Show Author Affiliations
Masafumi Kimata, Mitsubishi Electric Corp. (Japan)
Tatsuo Ozeki, Mitsubishi Electric Corp. (Japan)
Masahiro Nunoshita, Mitsubishi Electric Corp. (Japan)
Sho Ito, Mitsubishi Electric Corp. (Japan)


Published in SPIE Proceedings Vol. 3179:
Solid State Crystals in Optoelectronics and Semiconductor Technology

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