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Proceedings Paper

Optical and electrical tests of uniformity of rf PCVD carbon coatings
Author(s): Malgorzata Langer; Piotr Niedzielski
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Paper Abstract

Amorphous carbon and nanocrystalline diamond layers are very interesting candidates for active and passive electronic and optoelectronic applications. One well knows that diamond films possess semiconductor properties. Because of their temperature stability, chemical inertness, large energy gap they are very perspective. The principal condition to apply them is not only to gain the high quality of the parameters but also to assure the stability of the obtained films' properties. The films discussed in this paper are deposited by r.f. dense plasma PCVD. To verify the structure quality it is sufficient to make quite easy measurements: ellipsometric ones and breakdown voltage. The structure image, on the level of ultra fine grains can be visible with the aid of atomic force microscope.

Paper Details

Date Published: 13 June 1997
PDF: 3 pages
Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); doi: 10.1117/12.276201
Show Author Affiliations
Malgorzata Langer, Technical Univ. of Lodz (Poland)
Piotr Niedzielski, Technical Univ. of Lodz (Poland)


Published in SPIE Proceedings Vol. 3179:
Solid State Crystals in Optoelectronics and Semiconductor Technology

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