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Proceedings Paper

Application of fiber optic sensors to wastewater management using microelectronics fabrication processes
Author(s): Dumitru Gh. Ulieru
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Paper Abstract

The concept of waste water treatment from microelectronics fab processes is referring to waste water discharged from ultrapure water plant which can't be treated on recovery waste water section. These wastes concentrated contain organic and inorganic acids, alkalis, metals, cyanide, chromium and fluoride effluent from fab processes. They will be canalized on qualities for treatment sections which permit the discharge of treated waste water as neutral with solids removal as compacted sludge. For management of the waste water treatment plant we are using the fiber optic sensors as follows: level and flow control, signalization automatic pumps control and protection, solid control, leak detection a.s.o. The neutral quality of treated water has 'null' impact against the environmental system recommended for all semiconductors and microelectronics fab processes.

Paper Details

Date Published: 30 May 1997
PDF: 11 pages
Proc. SPIE 3105, Chemical, Biochemical and Environmental Fiber Sensors IX, (30 May 1997); doi: 10.1117/12.276157
Show Author Affiliations
Dumitru Gh. Ulieru, Romes SA (Romania)


Published in SPIE Proceedings Vol. 3105:
Chemical, Biochemical and Environmental Fiber Sensors IX
Robert A. Lieberman, Editor(s)

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