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Proceedings Paper

Stability of glass probe tips for critical dimension measurement
Author(s): Joseph E. Griffith; Gabriel L. Miller; Leslie C. Hopkins; Charles E. Bryson III; E. J. Snyder; J. J. Plombon; Leonid A. Vasilyev; Jeffery B. Bindell
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Paper Abstract

One of the fundamental requirements for reliable critical dimension measurement with a scanning probe microscope is stability of the stylus against flexing and against erosion. We report on the wear of an etched optical fiber when scanned across a variety of surfaces. The optical fiber probe tip was used in a novel scanning probe microscope employing a balance beam force sensor.

Paper Details

Date Published: 7 July 1997
PDF: 11 pages
Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); doi: 10.1117/12.275932
Show Author Affiliations
Joseph E. Griffith, Lucent Technologies Bell Labs. (United States)
Gabriel L. Miller, Lucent Technologies Bell Labs. (United States)
Leslie C. Hopkins, Lucent Technologies Bell Labs. (United States)
Charles E. Bryson III, Surface/Interface Inc. (United States)
E. J. Snyder, Surface/Interface Inc. (United States)
J. J. Plombon, Surface/Interface Inc. (United States)
Leonid A. Vasilyev, Surface/Interface Inc. (United States)
Jeffery B. Bindell, Lucent Technologies (United States)


Published in SPIE Proceedings Vol. 3050:
Metrology, Inspection, and Process Control for Microlithography XI
Susan K. Jones, Editor(s)

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