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Proceedings Paper

Survey of scanning electron microscopes using quantitative resolution evaluation
Author(s): Gilles L. Fanget; Herve M. Martin; Brigitte Florin
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Paper Abstract

Critical dimension scanning electron microscopes (CD SEM) resolution impacts on the quality of measurements. Previous works have proposed two dimensions fast Fourier transform image analysis, to get an operator free evaluation of the resolution. This method combined with a well suited sample leads to a powerful way to monitor the SEMs. A daily use enables us to quantify the effect of parameters that were previously hidden. It detects the need for service and is a non biased test for the equipment.

Paper Details

Date Published: 7 July 1997
PDF: 13 pages
Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); doi: 10.1117/12.275930
Show Author Affiliations
Gilles L. Fanget, LETI/DMEL-CEA (France)
Herve M. Martin, CNET-SGS Thomson (France)
Brigitte Florin, LETI/DMEL-CEA (France)

Published in SPIE Proceedings Vol. 3050:
Metrology, Inspection, and Process Control for Microlithography XI
Susan K. Jones, Editor(s)

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