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Proceedings Paper

Overlay measurements and edge detection methods
Author(s): Alexander I. Zaslavsky
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Paper Abstract

In order to perform an overlay measurement, one must use some edge detection method. Different edge detection methods have different sensitivity to noise. We define a large class of edge detection methods, and find in this class the methods least sensitive to noise. We consider continuous as well as discrete signals, and use different assumptions about the nature of noise.

Paper Details

Date Published: 7 July 1997
PDF: 7 pages
Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); doi: 10.1117/12.275928
Show Author Affiliations
Alexander I. Zaslavsky, KLA Instruments Corp. (Israel)

Published in SPIE Proceedings Vol. 3050:
Metrology, Inspection, and Process Control for Microlithography XI
Susan K. Jones, Editor(s)

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