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Proceedings Paper

Novel process of isolating novolac resin fractions
Author(s): M. Dalil Rahman; Ping-Hung Lu; Michelle M. Cook
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Paper Abstract

Typical phenol/formaldehyde resin syntheses generate a broad distribution of molecular weight fragments with a wide polydispersity. A process was developed to isolate novolak resin fractions of narrow polydispersity from phenol- formaldehyde condensation products in ethyl lactate without any high temperature distillation. The characterization and the performance of these fractions in i-line photoresist composition are discussed.

Paper Details

Date Published: 7 July 1997
PDF: 10 pages
Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); doi: 10.1117/12.275863
Show Author Affiliations
M. Dalil Rahman, Hoechst Celanese Corp. (United States)
Ping-Hung Lu, Hoechst Celanese Corp. (United States)
Michelle M. Cook, Hoechst Celanese Corp. (United States)


Published in SPIE Proceedings Vol. 3049:
Advances in Resist Technology and Processing XIV
Regine G. Tarascon-Auriol, Editor(s)

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