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Proceedings Paper

Effect of salt on the dissolution of novolac in base
Author(s): Myoung-Soo Kim; Arnost Reiser
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Paper Abstract

The increase in dissolution rate brought about by the addition of salt to the developer is caused by the difference in the diffusivities of the OH- ions of the base and the anions of the salt. Adding salt increases the flux of cations into the film allowing the flux of anions to increase too. The faster OH- ions, which alone control the dissolution of the resin film, benefit more from this opportunity than the anions of the salt. At very high salt concentrations a retardation-of-dissolution effects sets in that can be understood in terms of a competition of different types of ions for the available percolation sites.

Paper Details

Date Published: 7 July 1997
PDF: 7 pages
Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); doi: 10.1117/12.275834
Show Author Affiliations
Myoung-Soo Kim, Polytechnic Univ. of New York (United States)
Arnost Reiser, Polytechnic Univ. of New York (United States)


Published in SPIE Proceedings Vol. 3049:
Advances in Resist Technology and Processing XIV
Regine G. Tarascon-Auriol, Editor(s)

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