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Proceedings Paper

First study of a flat vacuum image sensor with a field-emitter array
Author(s): Toshio Yamagishi; Masakazu Nanba; Saburo Okazaki; Kenkichi Tanioka; Fumio Sato; Norifumi Egami
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Paper Abstract

To develop a high-definition image sensor having ultra-high sensitivity far superior to CCDs. A new compact image sensor consisting of a matrix field emitter array (FEA) and a high- gain avalanche rushing amorphous photoconductor (HARP) target is studied. Most research on devices with FEAs has so far focused on flat displays and high-frequency devices. Although the concept of a flat image sensor with FEAs has been proposed before, image sensors with FEAs have yet to be fabricated. In this paper, the fundamental driving characteristics of a new flat image sensor comprised of an X-Y matrix FEA set face to face with a HARP target have been investigated in a vacuum chamber for the first time. Experiments confirmed that the device successfully picks up images. High-sensitivity is achieved with the HARP target, and the temporal fluctuation and spatial variation of the emission currents obtained from the FEA have almost no effect on the signal output currents. Furthermore, the resolution characteristics are affected by the mesh voltage and by divergence of the emission from the field emitter tips.

Paper Details

Date Published: 25 April 1997
PDF: 9 pages
Proc. SPIE 3019, Solid State Sensor Arrays: Development and Applications, (25 April 1997); doi: 10.1117/12.275169
Show Author Affiliations
Toshio Yamagishi, NHK Science and Technical Research Labs. (Japan)
Masakazu Nanba, NHK Science and Technical Research Labs. (Japan)
Saburo Okazaki, NHK Science and Technical Research Labs. (Japan)
Kenkichi Tanioka, NHK Science and Technical Research Labs. (Japan)
Fumio Sato, NHK Science and Technical Research Labs. (Japan)
Norifumi Egami, NHK Science and Technical Research Labs. (Japan)


Published in SPIE Proceedings Vol. 3019:
Solid State Sensor Arrays: Development and Applications
Morley M. Blouke, Editor(s)

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