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Proceedings Paper

Greater-than-90% QE in visible spectrum perceptible from UV to near-IR Hamamatsu thinned back-illuminated CCDs
Author(s): Masaharu Muramatsu; Hiroshi Akahori; Katsumi Shibayama; Syunsuke Nakamura; Kouei Yamamoto
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Paper Abstract

CCDs feature low amplifier noise, high sensitivity and wide dynamic range. Therefore, CCDs have been used in such diverse applications as general purpose imaging, industrial inspection, medical diagnostics and astrophysics. For each application, a suitable image area, optical characteristics, electrical characteristics and even appropriate package must be required. Among these, back illuminated CCDs have enhanced sensitivity for UV light, soft x-rays and electrons. Hamamatsu Photonics KK has developed FFT, MPP mode back illuminated CCDs optimized for spectroscopy. For spectroscopic applications, CCDs should have responsivity from the UV to near-IR as well as having low dark current and wide dynamic range in the binning mode. Stability of the spectral response curve is also important to achieve high precision measurements.

Paper Details

Date Published: 25 April 1997
PDF: 7 pages
Proc. SPIE 3019, Solid State Sensor Arrays: Development and Applications, (25 April 1997); doi: 10.1117/12.275165
Show Author Affiliations
Masaharu Muramatsu, Hamamatsu Photonics KK (Japan)
Hiroshi Akahori, Hamamatsu Photonics KK (Japan)
Katsumi Shibayama, Hamamatsu Photonics KK (Japan)
Syunsuke Nakamura, Hamamatsu Photonics KK (Japan)
Kouei Yamamoto, Hamamatsu Photonics KK (Japan)

Published in SPIE Proceedings Vol. 3019:
Solid State Sensor Arrays: Development and Applications
Morley M. Blouke, Editor(s)

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