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Proceedings Paper

Replicating diffractive optical elements on DuPont photopolymer by optical lithography using a HEBS-glass gray-scale mask
Author(s): Pin Long; Walter Daschner; Eric Johnson; Sing H. Lee
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Paper Abstract

Diffractive optical elements (DOEs) of the kinoform type have been fabricated on DuPont photopolymer by using a gray scale mask technology. The fabricated DOEs have high diffraction efficiency and low noise. Compared with the conventional DOE fabrication the new process is rather simple and does not involve expensive capital equipment such as mask aligners and dry etching systems, and can be extended to mass production.

Paper Details

Date Published: 15 May 1997
PDF: 6 pages
Proc. SPIE 3010, Diffractive and Holographic Device Technologies and Applications IV, (15 May 1997); doi: 10.1117/12.274406
Show Author Affiliations
Pin Long, QPS Technology Inc. (United States)
Walter Daschner, Univ. of California/San Diego (United States)
Eric Johnson, Digital Optics Corp. (United States)
Sing H. Lee, Univ. of California/San Diego (United States)


Published in SPIE Proceedings Vol. 3010:
Diffractive and Holographic Device Technologies and Applications IV
Ivan Cindrich; Sing H. Lee, Editor(s)

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