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Proceedings Paper

248-nm laser interaction studies on LaF3/MgF2 optical coatings by cross sectional transmission electron microscopy
Author(s): Zsolt Czigany; Miklos Adamik; Norbert Kaiser
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Paper Abstract

LaF3MgF2 high-reflectance optical multilayer coatings were deposited by e-beam evaporation and investigated by cross-sectional transmission electron microscopy concentrating on the evolution of the film structure during growth and due to laser irradiation. The irradiated samples show enhanced texture compared to the as deposited films, indicating that recrystallization took place due to the laser irradiation. The waviness of the interfaces between the single quarter-wave sublayers in the multilayer system increase with increasing distance from the substrate.This effect may result in increased scatter losses, especially in the ultraviolet spectral region.

Paper Details

Date Published: 13 May 1997
PDF: 7 pages
Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); doi: 10.1117/12.274288
Show Author Affiliations
Zsolt Czigany, Research Institute for Technical Physics (Hungary)
Miklos Adamik, Research Institute for Technical Physics (Hungary)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 2966:
Laser-Induced Damage in Optical Materials: 1996
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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