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Proceedings Paper

Ultralow-cost surface-micromachined tunneling sensor
Author(s): Deborah J. Kirby; Randall L. Kubena; Fred P. Stratton; W. P. Robinson; Robert L. Joyce; Leroy H. Hackett
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Paper Abstract

Hughes Electronics has developed a novel surface micromachining process for fabricating extremely low cost integrated tunneling sensors for a wide variety of military and commercial applications. Previously fabricated bulk micromachined tunneling devices have demonstrated the high displacement sensitivity (approximately 4.0 X 10-5 nm/(root)Hz at 500 Hz) obtainable with tunneling transduction. However, these early devices were fabricated with processes that yielded fairly large multi- wafer sensors which are difficult to integrate with the control electronics and package, thus limiting commercial development. This paper describes our surface micromachining techniques, their compatibility with large volume production, accelerometer device performance, and the system applications for this new technology.

Paper Details

Date Published: 25 April 1997
PDF: 5 pages
Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); doi: 10.1117/12.273841
Show Author Affiliations
Deborah J. Kirby, Hughes Research Labs. (United States)
Randall L. Kubena, Hughes Research Labs. (United States)
Fred P. Stratton, Hughes Research Labs. (United States)
W. P. Robinson, Hughes Research Labs. (United States)
Robert L. Joyce, Hughes Research Labs. (United States)
Leroy H. Hackett, Hughes Research Labs. (United States)

Published in SPIE Proceedings Vol. 3007:
Silicon-Based Monolithic and Hybrid Optoelectronic Devices
Derek C. Houghton; Bahram Jalali, Editor(s)

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