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Proceedings Paper

Dielectric nonlinearity and loss in ferroelectric thin films
Author(s): Xiaoxing Xi
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Paper Abstract

Pulsed laser deposition has been used to deposit multilayer heterostructures consisting of high temperature superconductor (HTS) and ferroelectric layers for tunable microwave device applications. The dielectric nonlinearity and loss of the ferroelectric thin films are the key material parameters determining the performance of the tunable devices and hence the feasibility of this technology. In this paper, I summarize the current understanding of these issues and outline the strategies to study these problems.

Paper Details

Date Published: 9 May 1997
PDF: 12 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273734
Show Author Affiliations
Xiaoxing Xi, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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