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Proceedings Paper

Multiple-watt ultraviolet power from a diode-pumped solid state laser at 1-kHz repetition rate
Author(s): Uwe Stamm; Wolfgang Zschocke; Bernard K. Nikolaus; Peter Genter; Dirk Basting
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Paper Abstract

A diode-pumped laser system is described operating at up to 1 kHz pulse repetition frequency. The system can be used at the wavelengths 1064 nm, 532 nm, 355 nm or 266 nm. Up to 10 W at 1064 nm and up to 6 W at 532 nm are generated. More than 4 W of average power is available at 355 nm from frequency tripling modules, still in a diffraction limited beam. Frequency quadrupling of the laser has delivered more than 2 W average power at 266 nm. The pulse repetition frequency and output pulse energy are continuously adjustable without changes in the other laser parameters. The high energy and the short duration of the laser pulses of 10 - 12 ns in combination with the high beam quality allows one to achieve power densities exceeding 100 GW/cm2 with simple focusing optics. Examples of applications in micromachining are given, and current limitations as well as future trends are discussed.

Paper Details

Date Published: 9 May 1997
PDF: 7 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273727
Show Author Affiliations
Uwe Stamm, Lambda Physik GmbH (Germany)
Wolfgang Zschocke, Lambda Physik GmbH (Germany)
Bernard K. Nikolaus, Lambda Physik GmbH (Germany)
Peter Genter, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)


Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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