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Proceedings Paper

Laser depth-controlled precision machining of advanced ceramics
Author(s): Suwas K. Nikumb; M. U. Islam
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Paper Abstract

Development of advanced engineering materials, such as ceramics and their composites, CVD silicon carbide, silicon nitride, CVD diamond, etc.; has created many opportunities for their use in a number of applications. These materials offer attractive properties, including superior hardness, strength, wear and corrosion resistance, and electronic properties. However, conventional machining processes are inadequate to fabricate multi-dimensional, precision components from these materials. Lately, lasers have been shown to be very effective in machining these hard materials. In this paper, recent results of our work on depth controlled precision machining of commercially available ceramics using a diode pumped, pulsed Nd:YAG laser are presented. The effects of laser processing parameters: percentage spot overlap, machining speed, and number of layers removed on the depth of the machined groove and surface roughness are discussed.

Paper Details

Date Published: 9 May 1997
PDF: 7 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273725
Show Author Affiliations
Suwas K. Nikumb, National Research Council of Canada (Canada)
M. U. Islam, National Research Council of Canada (Canada)

Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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