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Proceedings Paper

Rapid fabrication of diffractive optical elements by excimer laser micromachining
Author(s): Michael T. Duignan; Gregory P. Behrmann
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Paper Abstract

We describe the rapid fabrication of binary, multilevel, and blazed diffractive optical elements, using a tabletop excimer laser micromachining workstation and optical surface profiler. Functional DOEs are produced in minutes to hours in polymer films. We also show that laser-machined polymer DOEs can be transferred to fused silica by reactive ion etching.

Paper Details

Date Published: 9 May 1997
PDF: 9 pages
Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); doi: 10.1117/12.273723
Show Author Affiliations
Michael T. Duignan, Potomac Photonics, Inc. (United States)
Gregory P. Behrmann, Potomac Photonics, Inc. (United States)

Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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