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Proceedings Paper

Modeling of a filamental discharge formation and development in ArF excimer laser
Author(s): Haruaki Akashi; Yosuke Sakai; Hiroaki Tagashira; Nobuaki Takahashi; Tai Sasaki
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Paper Abstract

Dynamics of a constricted filamental discharge in a discharge- excited ArF excimer laser have been examined using a two dimensional fluid model. An entire process of the filamental discharge, from its initiation and development to extinction, is shown. The filamental discharge is triggered at protrusions which would always exist on cathode surfaces, and develops in the direction of the anode assisted by the high field induced by space charge. The gas temperature in the filamental discharge in the vicinity of the cathode is found to rise. This temperature is shown to play an important role in development of the filamental discharge. The effect of preionization electron density ne0 is also examined, and significant development of the filamental discharge toward the anode is seen when the ne0 becomes lower. The results are examined properly in connection with experimental observations.

Paper Details

Date Published: 2 May 1997
PDF: 11 pages
Proc. SPIE 2989, Modeling and Simulation of Higher-Power Laser Systems IV, (2 May 1997); doi: 10.1117/12.273667
Show Author Affiliations
Haruaki Akashi, National Defense Academy (Japan)
Yosuke Sakai, Hokkaido Univ. (Japan)
Hiroaki Tagashira, Hokkaido Institute of Technology (Japan)
Nobuaki Takahashi, National Defense Academy (Japan)
Tai Sasaki, National Defense Academy (Japan)


Published in SPIE Proceedings Vol. 2989:
Modeling and Simulation of Higher-Power Laser Systems IV
Usamah O. Farrukh; Santanu Basu, Editor(s)

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