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Proceedings Paper

Thin-film analysis based on the ratio of envelopes of the reflectance spectra measured at two incident angles
Author(s): Valery N. Filippov
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Paper Abstract

Absolute reflectivity measurements are needed for the determination of optical parameters and the thickness of a film on an absorbing substrate by method of envelopes. In the article the ratio of minima and maxima envelopes of the reflectance spectra is introduced. This parameter allows to avoid absolute measurements. An application of the ratio measurements for the analysis of isotropic absorbing homogeneous films is described. Provided the film is transparent, the approach proposed leads to the simple analytical solution of an inverse problem.

Paper Details

Date Published: 1 April 1997
PDF: 6 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271839
Show Author Affiliations
Valery N. Filippov, Institute of Physics (Belarus)


Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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