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Proceedings Paper

Determination of anisotropic film thickness, complex reflective indices, and their dispersion from reflectance spectra
Author(s): Valery N. Filippov; Vitaly P. Kutavichus
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Paper Abstract

The method of envelopes and based on reflectance measurements only, is developed for investigation of uniaxial absorbing films formed on absorbing substrates. Two optical axis orientations parallel and perpendicular to the film interfaces are analyzed. Reflectance spectra for p and s linear polarizations are used to determine the complex dielectric constants of the film Eo ((lambda) ) and Ee ((lambda) ) and its thickness. For the transparent films the analytical solutions are obtained for these parameters. The simple iterative procedure are used for their determination in the case of absorbing films. Numerical model calculations are carried out to study the characteristics of the method developed. They show high stability of the real parts of Eo and h determination to the measurement error.

Paper Details

Date Published: 1 April 1997
PDF: 5 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271838
Show Author Affiliations
Valery N. Filippov, Institute of Physics (Belarus)
Vitaly P. Kutavichus, Institute of Physics (Belarus)

Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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