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Proceedings Paper

Comparison of the precision of a null-ellipsometer to an ellipsometer with a rotating analyzer
Author(s): Eugene G. Bortchagovsky; O. M. Getsko
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Paper Abstract

Comparison of the precision of measurements by means of null-ellipsometer with rotating analyzer is made here on the base of the developed formalism. The dependence of measurement's errors on the reflectivity of an investigated system is taken into account and is the base of the presented comparison.

Paper Details

Date Published: 1 April 1997
PDF: 4 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271825
Show Author Affiliations
Eugene G. Bortchagovsky, Institute of Semiconductor Physics (Ukraine)
O. M. Getsko, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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