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Proceedings Paper

Accuracy of traditional ellipsometry and complex ellipsometry-transmission photometry techniques for absorptive-film/transparent-substrate systems
Author(s): A. M. Kostruba; Orest G. Vlokh
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Paper Abstract

The new method for the determination of the high absorptive thin film parameters is proposed. This technique consist in the complex ellipsometry + photometry measurements. The comparison of the principal parameters of the proposed technique and the traditional ellipsometry methods is carried out.

Paper Details

Date Published: 1 April 1997
PDF: 6 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271824
Show Author Affiliations
A. M. Kostruba, Institute of Physical Optics (Ukraine)
Orest G. Vlokh, Institute of Physical Optics (Ukraine)


Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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