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Proceedings Paper

Polarimetric investigations of residual stresses in Czochralski-grown LiNbO3 single crystals
Author(s): Andrzej L. Bajor; Zbigniew Galazka
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Paper Abstract

In this work practical investigations of residual stresses in LiNbO3 crystals measured by the computer-controlled imaging polarimeter are compared with theoretical model developed for oxide crystalline materials. A good qualitative agreement has been found between theory and experiment regarding residual stress distributions in wafers cut out perpendicularly to the crystal's growth axis.

Paper Details

Date Published: 1 April 1997
PDF: 12 pages
Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); doi: 10.1117/12.271808
Show Author Affiliations
Andrzej L. Bajor, Institute of Electronic Materials Technology (Poland)
Zbigniew Galazka, Institute of Electronic Materials Technology (Poland)


Published in SPIE Proceedings Vol. 3094:
Polarimetry and Ellipsometry
Maksymilian Pluta; Tomasz R. Wolinski, Editor(s)

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