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Proceedings Paper

Laser setup for flat optical components fabrication with submicron resolution
Author(s): Valery P. Kiryanov
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Paper Abstract

Laser setup for flat optical components fabrication with submicron resolution has been developed at the Technological Design Institute of Scientific Instrument Engineering in cooperation with the Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of Sciences and can be delivered to buyers on individual orders. Laser pattern generators in polar coordinate system are optimum for the fabrication of masks, angular scales, optical memory and diffractive optical elements. Accuracy and spatial resolution of recorded structures are comparable with analogous parameters of E-beam pattern generators. However cost of the first one is significantly smaller and it is more simple to work with such equipment.

Paper Details

Date Published: 2 April 1997
PDF: 5 pages
Proc. SPIE 3091, Laser Applications Engineering (LAE-96), (2 April 1997); doi: 10.1117/12.271777
Show Author Affiliations
Valery P. Kiryanov, Technological Design Institute of Scientific Instrument Engineering (Russia)


Published in SPIE Proceedings Vol. 3091:
Laser Applications Engineering (LAE-96)
Vadim P. Veiko, Editor(s)

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