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Proceedings Paper

Spectroscopic studies during pulsed laser ablation deposition of C-N films
Author(s): S. Acquaviva; A. P. Caricato; M. L. De Giorgi; Armando Luches; Alessio Perrone
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Paper Abstract

Time-integrated optical emission spectra were recorded during XeCl laser ablation of graphite targets in vacuo and in low pressure (up to 2.5 mbar) N2 and NH3 atmospheres. The emission spectra of the laser induced plasma plume recorded during ablation in vacuo are dominated by the bands of the C2 Swan system. Weaker bands from CN are well evident. Spectra recorded during ablation in NH3 are also dominated by the bands of the C2 Swan system. During ablation in N2 (10-4 - 2.5 mbar), strong bands of the CN violet system are detected. Their intensities increase with increasing N2 pressure and with increasing distance from the graphite target. Mass spectra were recorded during ablation in vacuo (10-6 mbar) and in N2 at 1 multiplied by 10-4 mbar. In vacuo, during the first stage of ablation, the mass spectra are characterized by the peaks at 12 and 26 a.m.u. (C and CN). The CN peak intensity decreases with the laser pulse number, to disappear after approximately 3000 laser pulses. In contrast, the peak at 26 a.m.u. is permanent during the whole ablation when N2 is introduced in the chamber.

Paper Details

Date Published: 4 April 1997
PDF: 11 pages
Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); doi: 10.1117/12.271684
Show Author Affiliations
S. Acquaviva, Univ. di Lecce (Italy)
A. P. Caricato, Univ. di Lecce (Italy)
M. L. De Giorgi, Univ. di Lecce (Italy)
Armando Luches, Univ. di Lecce (Italy)
Alessio Perrone, Univ. di Lecce (Italy)


Published in SPIE Proceedings Vol. 3093:
Nonresonant Laser-Matter Interaction (NLMI-9)

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