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Proceedings Paper

UV-laser-induced polymer ablation: the role of volatile species
Author(s): M. Himmelbauer; Nikita M. Bityurin; Boris S. Luk'yanchuk; Nikita Arnold; Dieter Baeuerle
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Paper Abstract

Single-shot laser ablation of polyimide has been investigated with UV Ar+-laser radiation (lambda approximately equals 302 nm) for pulse lengths between 140 ns and 5000 ns. The dependences of the ablation rate on laser pulse length and intensity were measured by means of an atomic force microscope (AFM). These data are compared with mass-loss measurements using a microbalance. The experimental data are analyzed by taking into account both mass losses related to volatile product species and real material ablation.

Paper Details

Date Published: 4 April 1997
PDF: 5 pages
Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); doi: 10.1117/12.271677
Show Author Affiliations
M. Himmelbauer, Johannes Kepler Univ. (Austria)
Nikita M. Bityurin, Institute of Applied Physics (Russia)
Boris S. Luk'yanchuk, General Physics Institute (Russia)
Nikita Arnold, Johannes Kepler Univ. (Austria)
Dieter Baeuerle, Johannes Kepler Univ. (Austria)

Published in SPIE Proceedings Vol. 3093:
Nonresonant Laser-Matter Interaction (NLMI-9)
Vitali I. Konov; Mikhail N. Libenson, Editor(s)

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