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Proceedings Paper

Large-area surface-discharge UV light source for materials processing applications
Author(s): Robert C. Sze
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Paper Abstract

Performance of a 6 inch by 6 inch surface discharge that give integrated light intensities greater than 400 mJ/cm2 is reported here. Light uniformity on the surface of high density alumina dielectric has been measured to show better than 5% across the entire discharge area. Detailed spectroscopic content of these discharges in different gases and gas mixtures are presented from 160 nm to 735 nm region.

Paper Details

Date Published: 4 April 1997
PDF: 6 pages
Proc. SPIE 2987, Gas and Chemical Lasers and Applications II, (4 April 1997); doi: 10.1117/12.271553
Show Author Affiliations
Robert C. Sze, Los Alamos National Lab. (United States)

Published in SPIE Proceedings Vol. 2987:
Gas and Chemical Lasers and Applications II
Robert C. Sze; Ernest A. Dorko, Editor(s)

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