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Proceedings Paper

Ferroelectric PbZr1-xTixO3 thin films made by various metalorganic chemical vapor deposition techniques
Author(s): Tingkai Li; Peter A. Zawadzki; Richard A. Stall; William J. Kroll
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Paper Abstract

Ferroelectric films of PbZr1-xT1xO3 (PZT) have been prepared by various MOCVD techniques including bubbler, direct liquid injection, plasma enhanced MOCVD and TurboDisc techniques. The titanium tetraisopropoxide was used as the precursor for titanium source, while lead bis- tetramethylheptadione, zirconium tetrak1s- tetramethylheptadione were used as sources for lead and zirconium respectively. The PZT films were deposited onto Pt/T1/S1O2/S1 wafers and single-crystal sapphire substrates to measure their phase formation, microstructure and ferroelectric properties. It was found that nucleation of PZT perovskite phase started at a deposition temperature over 550 degrees C and grain growth dominated at 650 degrees C or above. The grain size of PbZr05T105O3 thin films increased from 0.04 micrometers to 0.3 micrometers with increasing deposition temperature. The microstructure of the films was found to be dense and homogeneous. The PZT thin films made by MOCVD exhibit excellent ferroelectric properties. Typically the 300 nm thick PZT films with grain size about 0.3 micrometers on Pt electrodes have Pr greater than 20-30 (mu) C/cm2 at 5V, dielectric constant around 1000, low coercive field Ec50-70 kV/cm, low fatigue rate and leakage current 2-6 X 10-7 A/cm2 at 150 kV/cm and room temperature. The microstructure and ferroelectric properties of PZT thin films made by various MOCVD techniques were also investigated.

Paper Details

Date Published: 11 April 1997
PDF: 6 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271435
Show Author Affiliations
Tingkai Li, Emcore Corp. (United States)
Peter A. Zawadzki, Emcore Corp. (United States)
Richard A. Stall, Emcore Corp. (United States)
William J. Kroll, Emcore Corp. (United States)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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