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Proceedings Paper

Electromagnetic near field induced by surface defects in microstructures
Author(s): Zhi-Yuan Li; Guozhen Yang; Ben-Yuan Gu
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Paper Abstract

An intersecting waveguide modulator which utilizes the carrier injection effects is presented and characterized. Using O+ implantation to render the implanted region electrically inactive, a well confined injection carrier channel is formed. This area can be driven to function as waveguide or as antiwaveguide. A transversal electrode switches the modulator from the On-state to the Off-state or vice versa. By the use of carrier induced refractive index modeling and the finite difference beam propagation method (FD-BPM) simulation, good performance and small injection current ofthis modulator are predicted.

Paper Details

Date Published: 11 April 1997
PDF: 10 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271433
Show Author Affiliations
Zhi-Yuan Li, Institute of Physics (China)
Guozhen Yang, Institute of Physics (China)
Ben-Yuan Gu, Institute of Physics (China)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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