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Proceedings Paper

Method of computer-controlled microlens processing and testing
Author(s): Sergey A. Rodionov; Vadim P. Veiko; Alexander T. Shakola; Vitaly M. Domnenko; Vadim A. Patlaty
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Paper Abstract

Computer controlled process of microlens manufacturing and testing is described. Lens figuring is made by high energy CO2 laser beam scanning over surface. Testing procedure is realized in the same installation without removal of manufactured lens. Test uses low energy He-Ne laser beam scanning over entrance pupil of lens using the same scanning system as during manufacturing procedure. Testing method is based on principles of Hartmann test but do not use any diaphragm. The least squares method is used to determine coefficients of Zernike polynomial expansion, describing testing lens surface figuring errors.

Paper Details

Date Published: 11 April 1997
PDF: 5 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271428
Show Author Affiliations
Sergey A. Rodionov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Alexander T. Shakola, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Vitaly M. Domnenko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Vadim A. Patlaty, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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