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Proceedings Paper

Laser aperture integrated with position-sensing detectors
Author(s): Evan D. Green; Kulwant S. Brar
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Paper Abstract

A laser alignment aperture for automation of laser beam alignment has been realized. The expected system application is to define a straight line by placing apertures integrated with position sensitive photodiodes in the beam path. Any deviation of the incident laser beam from the predetermined path causes it to strike one of the four photodiode quadrants around one of the apertures. The photocurrent signal produced at one of the four detector quadrants, when compared to the photocurrents from the other quadrants provides a measurement of the beam position. Using standard silicon microfabrication and micromachining processes, apertures from 0.5 to 1.3 mm diameter have been fabricated.

Paper Details

Date Published: 11 April 1997
PDF: 10 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271422
Show Author Affiliations
Evan D. Green, Focused Research, Inc. (United States)
Kulwant S. Brar, San Jose State Univ. (United States)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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