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Proceedings Paper

Optical characterization methods of InP-based micro-opto-electro-mechanical systems
Author(s): Ronan Le Dantec; Taha Benyattou; Gerard Guillot; Christian Seassal; Jean Louis Leclercq; Xavier Letartre; A. Gagnaire; Michel Gendry; Pierre Viktorovitch; Ramdane Benferhat; D. Rondi; Robert R. Blondeau
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Paper Abstract

We have studied actuable suspended beams that form vertical optical resonant cavities. They are fabricated by sacrificial layers etching techniques on InP. They can be used as tunable optical filters for telecommunication applications. In this paper, we report optical characterizations of those devices. We have used micro reflectivity and optical profilometer measurements to make those characterizations. We have developed a micro- reflectivity experimental setup which uses the confocal principle. We have shown the deformation of the suspended beams and the variation of the reflectivity response induced by electrostatic actuation of the devices.

Paper Details

Date Published: 11 April 1997
PDF: 7 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271421
Show Author Affiliations
Ronan Le Dantec, Institut National des Sciences Appliquees de Lyon (France)
Taha Benyattou, Institut National des Sciences Appliquees de Lyon (France)
Gerard Guillot, Institut National des Sciences Appliquees de Lyon (France)
Christian Seassal, Ecole Centrale de Lyon (France)
Jean Louis Leclercq, Ecole Centrale de Lyon (France)
Xavier Letartre, Ecole Centrale de Lyon (France)
A. Gagnaire, Ecole Centrale de Lyon (France)
Michel Gendry, Ecole Centrale de Lyon (France)
Pierre Viktorovitch, Ecole Centrale de Lyon (France)
Ramdane Benferhat, Jobin Yvon (France)
D. Rondi, Thomson-CSF (France)
Robert R. Blondeau, Thomson-CSF (France)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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