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Proceedings Paper

Strength of indium phosphide-based microstructures
Author(s): Staffan Greek; Klas Hjort; Jan-Ake Schweitz; Christian Seassal; Jean Louis Leclercq; Michel Gendry; Marie-Paule Besland; Pierre Viktorovitch; C. Figuet; V. Souliere; Y. Monteil
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Paper Abstract

Microoptoelectromechanical (MOEMS) systems with InP based micromechanics are proposed for devices with wide tuning ranges in the optical wavelengths where InP optoelectronics are normally used. To evaluate if these InP based micromechanical structures may be strong enough the mechanical strengths of surface micromachined epitaxial InP micro beams are evaluated. Reactive ion etching (RIE) with CH4:H2:H2Ar is used to structure the beams. A sacrificial InGaAs layer is below the InP microstructures and selectively etched by HCl:H2O2:H2O in ratios 1:1:10 to release the InP beams. Sublimation of tert-butanol is used to dry the micro structures. The RIE conditions are shown to be of large importance, since the induced surface defects are here the dominant reasons for fracture. Bending strength values up to 3.1 GPa were measured, i.e. much higher than for the strongest construction steel. Weibull statistics show that it is possible to make micromachines for typical MOEMS applications with acceptable loss in yield due to fracture probability, i.e. with a fracture probability of 0.0001 for 100 MPa maximum bending stress.

Paper Details

Date Published: 11 April 1997
PDF: 7 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271420
Show Author Affiliations
Staffan Greek, Uppsala Univ. (Sweden)
Klas Hjort, Uppsala Univ. (Sweden)
Jan-Ake Schweitz, Uppsala Univ. (Sweden)
Christian Seassal, Ecole Centrale de Lyon (France)
Jean Louis Leclercq, Ecole Centrale de Lyon (France)
Michel Gendry, Ecole Centrale de Lyon (France)
Marie-Paule Besland, Ecole Centrale de Lyon (France)
Pierre Viktorovitch, Ecole Centrale de Lyon (France)
C. Figuet, Univ. Lyon I--Claude Bernard (France)
V. Souliere, Univ. Lyon I--Claude Bernard (France)
Y. Monteil, Univ. Lyon I--Claude Bernard (France)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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