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Proceedings Paper

Assembling of micro-optical components
Author(s): Guenther Tittelbach; Ramona Eberhardt; Volker Guyenot
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Paper Abstract

In future most microoptical components will be applied as hybrid integrated systems. The manufacturing of beam shaping optics consisting of two or more microoptical components in a hybrid microsystem places demanding requirements on the assembling process due to the need for extreme positioning accuracy. The basis of the micro-assembly system is a high- precision robot. The robot is used to handle, to grip and to join the components with minimal position deviations. Various vacuum grippers are described. The dispensing of adhesive drops of approximately 5-30 nl volume is an essential part of the task.

Paper Details

Date Published: 11 April 1997
PDF: 9 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271419
Show Author Affiliations
Guenther Tittelbach, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)
Ramona Eberhardt, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)
Volker Guyenot, Fraunhofer-Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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