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Proceedings Paper

Micro-opto-electro-mechanical (MOEM) adaptive optic system
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Paper Abstract

This paper discusses the application of MOEM technology to adaptive optics. An experiment is described in which a micromachined mirror array is used in a closed loop adaptive optic demonstration. An interferometer wavefront sensor is used for wavefront sensing. Parallel analog electronics are used for the wavefront reconstruction. Parallel operational amplifiers are used to drive the micromirrors. The actuators utilize a novel silicon design developed by SY Technology, Inc. The actuators have a measured frequency response of 15kHz, and a maximum usable stroke of 4 microns. The entire adaptive optic demonstration has a bandwidth exceeding 10kHz. Measured performance is described. The experiments conducted are designed to explore the feasibility of creating a single chip adaptive optic system, also described in this paper. This chip would combine all on a single VLSI chip aspects of a complete adaptive optics system, wavefront sensing, wavefront reconstruction, and wavefront correction. The wavefront sensing would be accomplished with a novel compact shearing interferometer design. The analog refractive and diffractive micro optics will be fabricated using a new single step analog mask technology. The reconstruction circuit would use an analog resistive grid solver. The resistive grid would be fabricated in polysilicon. The drive circuits and micromirror actuators would use standard CMOS silicon fabrication methods.

Paper Details

Date Published: 11 April 1997
PDF: 13 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271413
Show Author Affiliations
Rodney L. Clark, MEMS Optical, Inc. (United States)
John R. Karpinisky, MEMS Optical, Inc. (United States)
Jay A. Hammer, MEMS Optical, Inc. (United States)
Roland B. Anderson, MEMS Optical, Inc. (United States)
Randall L. Lindsey, MEMS Optical, Inc. (United States)
Daniel M. Brown, MEMS Optical, Inc. (United States)
Paul H. Merritt, Air Force Phillips Lab. (United States)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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