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Proceedings Paper

Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect
Author(s): Christophe Gorecki; Franck Alexis Chollet; Hideki Kawakatsu
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Paper Abstract

As a novelty application of Si-based integrated optics, the preliminary results of realisation of a compact Mach-Zehnder interferometer will be presented. The deposition of a piezoelectric ZnO thin-film transducer on the reftrence arm of the interferometer will allow to transform this optically passive device in a device under an active phase modulation, useful to built a high-resolution microsensing systems with optical heterodyning.

Paper Details

Date Published: 11 April 1997
PDF: 8 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271410
Show Author Affiliations
Christophe Gorecki, Univ. of Tokyo (Japan)
Franck Alexis Chollet, Univ. of Tokyo (Japan)
Hideki Kawakatsu, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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