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Proceedings Paper

Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror
Author(s): Masaaki Ikeda; Hiroshi Goto; Hiromi Totani; Minoru Sakata; Tsuneji Yada
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Paper Abstract

For achieving higher performance and for miniaturizing the size of an optical scanning sensor, raising the scanning angle response, increasing the accuracy of detection of the scanning location independent from the environmental temperature, and miniaturizing an optical-scanning sensor were considered. And the silicon micromachined 2D optical scanner integrated with a piezoresistor for scanning location detection and a photodiode for optical intensity detection was newly designed and fabricated. The obtained results with the fabricated scanner are following. The scanner is capable of scanning a light beam more than 40 degrees 2D. The scanning angle sensitivities are 4.8 deg/V for horizontal direction and 10.5 deg/V for vertical direction. The scanning location detection sensitivity for each horizontal and vertical directions are 21 mV/deg and 26 mV/deg., respectively. The decrease of detection accuracy of scanning location has been reduced to less than 1 percent within +/- 10 degrees C temperature shift. And the photodetector has a photosensitivity of 0.33 A/W which allows the optical-scanning sensor to detect the reflected light intensity from an object which is 200 mm away from the sensor.

Paper Details

Date Published: 11 April 1997
PDF: 12 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271406
Show Author Affiliations
Masaaki Ikeda, OMRON Corp. (Japan)
Hiroshi Goto, OMRON Corp. (Japan)
Hiromi Totani, OMRON Corp. (Japan)
Minoru Sakata, OMRON Corp. (Japan)
Tsuneji Yada, OMRON Corp. (Japan)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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