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Proceedings Paper

Microactuated mirrors for beam steering
Author(s): Steven C. Gustafson; Gordon R. Little; David M. Burns; Victor M. Bright; Edward A. Watson
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Paper Abstract

The design, fabrication, and potential performance of micro- actuated mirrors for beam steering are considered. Micro- actuators are by definition small devices that implement small displacements; they typically function using either electrostatic attraction or thermal expansion and are much smaller and less expensive than voice coil, piezoelectric stack, and related macro-actuators. Mirrors for use with micro-actuators may consist of rigid optically flat plates, continuous deformable membranes of facesheets, or arrays of elements with many possible element shapes, spacings, and displacement patterns. In general, the number of potentially practical micro-actuated mirror designs for beam steering increases as angular range, aperture size, steering speed, optical quality, and optical power requirements decrease.

Paper Details

Date Published: 11 April 1997
PDF: 9 pages
Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); doi: 10.1117/12.271404
Show Author Affiliations
Steven C. Gustafson, Univ. of Dayton (United States)
Gordon R. Little, Univ. of Dayton (United States)
David M. Burns, Air Force Institute of Technology (United States)
Victor M. Bright, Air Force Institute of Technology (United States)
Edward A. Watson, Air Force Wright Lab. (United States)

Published in SPIE Proceedings Vol. 3008:
Miniaturized Systems with Micro-Optics and Micromechanics II
M. Edward Motamedi; Larry J. Hornbeck; Kristofer S. J. Pister, Editor(s)

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