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Proceedings Paper

Image preprocessing to improve the reliability of normalized correlation
Author(s): Douglas D. Bacon
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Paper Abstract

Machine vision based alignment is a fundamental feature of many types of semiconductor manufacturing equipment, and normalized correlation based pattern finding remains commercially popular as a core of the alignment systems. Despite its strengths, normalized correlation search (NCS) alone often fails to find the correct pattern when given the kind of degradations and nonlinear image variations seen in some semiconductor processes. This paper discusses the utilization of image processing prior to the execution of the NCS algorithm as a way to improve alignment reliability.

Paper Details

Date Published: 15 April 1997
PDF: 5 pages
Proc. SPIE 3029, Machine Vision Applications in Industrial Inspection V, (15 April 1997); doi: 10.1117/12.271243
Show Author Affiliations
Douglas D. Bacon, Vizonix Corp. (United States)


Published in SPIE Proceedings Vol. 3029:
Machine Vision Applications in Industrial Inspection V
A. Ravishankar Rao; Ning S. Chang, Editor(s)

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