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Proceedings Paper

Characterization of application-specific probes for SPMs
Author(s): Marco Tortonese; Michael Kirk
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Paper Abstract

This paper addresses the problem of determining the absolute force constant of Atomic Force Microscope cantilevers. In the method presented, the cantilever under test is deflected against a reference cantilever of known spring constant. The relative deflection of the two cantilevers is related to their spring constants. The novelty of our approach is in the use of a micromachined reference cantilever of a precisely controlled force constant. Preliminary results show that our method is capable of measuring the force constant of cantilevers in the range of 0.1 to 10 N/m with an accuracy of better than 20%. The error is dominated by the non-linear effects in the force versus distance curves used for the measurement.

Paper Details

Date Published: 15 April 1997
PDF: 8 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271229
Show Author Affiliations
Marco Tortonese, Park Scientific Instruments (United States)
Michael Kirk, Park Scientific Instruments (United States)


Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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